Thin CNx films prepared by vacuum rapid thermal annealingfn2 fn2 Paper presented at the 10th International School on Vacuum Electron and Ion Technologies, 22–27 September 1997, Varna, Bulgaria.
Titel:
Thin CNx films prepared by vacuum rapid thermal annealingfn2 fn2 Paper presented at the 10th International School on Vacuum Electron and Ion Technologies, 22–27 September 1997, Varna, Bulgaria.
Auteur:
Beshkov, G Dimitrov, DB Georgiev, St Petrov, P Zambov, L Ivanov, B Popov, C Georgiev, M