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Journal description
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Details for article 2 of 19 found articles
| Title: |
Boron doping effects and microcrystallite formation in SiC:H films prepared using ECR-CVD |
| Author: |
Yoon, S.F. |
| Appeared in: |
Vacuum |
| Paging: | Volume 48 (1997) nr. 6 pages 5 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 19 found articles
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