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Journal description
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Details for article 11 of 15 found articles
| Title: |
The effect of nitrogen content on the structure and mechanical properties of TiN films produced by magnetron sputtering |
| Author: |
Arnell, RD Colligon, JS Minnebaev, KF Yurasova, VE |
| Appeared in: |
Vacuum |
| Paging: | Volume 47 (1996) nr. 5 pages 7 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 15 found articles
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