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Journal description
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Details for article 65 of 126 found articles
| Title: |
LPCVD silicon carbide and silicon carbonitride films using liquid single precursors |
| Author: |
Kleps, L Caccavale, F Brusatin, G Angelescu, A Armelao, L |
| Appeared in: |
Vacuum |
| Paging: | Volume 46 (1995) nr. 8-10 pages 3 p. |
| Year: |
1995 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 65 of 126 found articles
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