|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 9 of 16 found articles
| Title: |
Silicon trench etching in a multi-frequency discharge reactor |
| Author: |
Haščik, Š Horniaková, A Huran, J |
| Appeared in: |
Vacuum |
| Paging: | Volume 45 (1994) nr. 8 pages 3 p. |
| Year: |
1994 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 16 found articles
| << previous | next >> |