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Journal description
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Details for article 21 of 74 found articles
| Title: |
Energy spectra of reflected and sputtered particles in magnetron deposition systems |
| Author: |
Moreno-Marín, JC Abril, I Gras-Marti, A Konoplev, V Jiménez-Rodriguez, JJ Pérez-Martin, AMC |
| Appeared in: |
Vacuum |
| Paging: | Volume 45 (1994) nr. 10-11 pages 3 p. |
| Year: |
1994 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 74 found articles
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