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                                       Details for article 79 of 94 found articles
 
 
  The anomalous depth distribution of low dose oxygen and nitrogen ions implanted into silicon
 
 
Title: The anomalous depth distribution of low dose oxygen and nitrogen ions implanted into silicon
Author: Wong, JKY
Kilner, JA
Danilin, AB
Charniy, IV
Charniy, LA
Appeared in: Vacuum
Paging: Volume 44 (1993) nr. 3-4 pages 4 p.
Year: 1993
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 79 of 94 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands