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Journal description
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Details for article 21 of 94 found articles
| Title: |
Ion-assisted selective deposition of aluminium for via-hole interconnections |
| Author: |
Barklund, AM Berg, S Katardjiev, IV Nender, C Carlsson, P |
| Appeared in: |
Vacuum |
| Paging: | Volume 44 (1993) nr. 3-4 pages 5 p. |
| Year: |
1993 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 94 found articles
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