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Journal description
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Details for article 2 of 14 found articles
| Title: |
A review of the properties of aluminium alloy films used during silicon device fabrication |
| Author: |
Wilson, R.J. Weiss, B.L. |
| Appeared in: |
Vacuum |
| Paging: | Volume 42 (1991) nr. 12 pages 11 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 14 found articles
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