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Journal description
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Details for article 63 of 215 found articles
| Title: |
Electron behaviour in cylindrical magnetron sputtering source |
| Author: |
Funato, Y. Akaishi, K. Kubota, Y. Tuzuki, T. Miyahara, A. |
| Appeared in: |
Vacuum |
| Paging: | Volume 41 (1990) nr. 7-9 pages 3 p. |
| Year: |
1990 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 63 of 215 found articles
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