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Journal description
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Details for article 164 of 241 found articles
| Title: |
Rapid formation of ultra-thin dielectrics by Si surface modification using a large area low energy electron beam |
| Author: |
Du, Y.C Wang, H Li, B.Z Sun, D.C Yu, Z.Q Li, F.M |
| Appeared in: |
Vacuum |
| Paging: | Volume 41 (1990) nr. 4-6 pages 4 p. |
| Year: |
1990 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 164 of 241 found articles
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