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Journal description
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Details for article 25 of 46 found articles
| Title: |
O+, O2 +, O3 + and O4 + ions in ArO2 sputtering discharges: comments on “Oxidation mechanism in rf CO2 plasma”, Vacuum, 36, 85 (1986) |
| Author: |
Aita, Carolyn Rubin Marhic, Michel E |
| Appeared in: |
Vacuum |
| Paging: | Volume 38 (1988) nr. 1 pages 2 p. |
| Year: |
1988 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 25 of 46 found articles
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