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Journal description
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Details for article 3 of 78 found articles
| Title: |
A multianalytical approach to the characterization of semi-insulating polycrystalline silicon films |
| Author: |
Harris, PG Andrews, DC Trigg, AD Richards, BP Powell, RJW |
| Appeared in: |
Vacuum |
| Paging: | Volume 33 () nr. 10-12 pages 862 |
| Year: |
1983 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 78 found articles
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