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Journal description
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Details for article 5 of 13 found articles
| Title: |
Kinetics and mechanisms of chemical reactions in nonequilibrium-plasma etching of silicon and silicon compounds |
| Author: |
Vinogradov, GK Nevzorov, PI Polak, LS Slovetsky, DI |
| Appeared in: |
Vacuum |
| Paging: | Volume 32 (1982) nr. 9 pages 9 p. |
| Year: |
1982 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 13 found articles
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