Digital Library
Close Browse articles from a journal
 
<< previous    next >>
     Journal description
       All volumes of the corresponding journal
         All issues of the corresponding volume
           All articles of the corresponding issues
                                       Details for article 5 of 13 found articles
 
 
  Kinetics and mechanisms of chemical reactions in nonequilibrium-plasma etching of silicon and silicon compounds
 
 
Title: Kinetics and mechanisms of chemical reactions in nonequilibrium-plasma etching of silicon and silicon compounds
Author: Vinogradov, GK
Nevzorov, PI
Polak, LS
Slovetsky, DI
Appeared in: Vacuum
Paging: Volume 32 (1982) nr. 9 pages 9 p.
Year: 1982
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 13 found articles
 
<< previous    next >>
 
 Koninklijke Bibliotheek - National Library of the Netherlands