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                                       Details for article 96 of 192 found articles
 
 
  5319. Langmuir probe studies and ion energies in gas discharges used for cleaning vacuum chambers
 
 
Title: 5319. Langmuir probe studies and ion energies in gas discharges used for cleaning vacuum chambers
Author:
Appeared in: Vacuum
Paging: Volume 32 (1982) nr. 12 pages 1 p.
Year: 1982
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 96 of 192 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands