|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 26 of 84 found articles
| Title: |
Features of the process of electric formation of MIM systems based on silicon oxynitride films |
| Author: | |
| Appeared in: |
Vacuum |
| Paging: | Volume 28 (1978) nr. 3 pages 2 p. |
| Year: |
1978 |
| Contents: | |
| Publisher: |
Pergamon Press |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 84 found articles
| << previous | next >> |