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Fabrication and characterization of TiO2 and SiO2 as protective coating for Mo/Si multilayer by ion beam sputtering |
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Titel: |
Fabrication and characterization of TiO2 and SiO2 as protective coating for Mo/Si multilayer by ion beam sputtering |
Auteur: |
Yao, Dianxiang Zhang, Zhe Liu, Xinyi Huang, Qiushi Liu, Xiangyue Huang, Siyi Qi, Runze Zhang, Zhong Liu, Shuhu Zheng, Lei Deng, Weiwei Wang, Zhanshan |
Verschenen in: |
Vacuum |
Paginering: |
Jaargang 238 () nr. C pagina's p. |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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