Thermal and plasma-enhanced ALD for the synthesis of inverse opal Al2O3 and its composite materials
Title:
Thermal and plasma-enhanced ALD for the synthesis of inverse opal Al2O3 and its composite materials
Author:
Lemago, Hamsasew Hankebo Arwen, Soeun Choi Hessz, Dóra Jágerszki, Gyula Pál, Petra Cserháti, Csaba Baradács, Eszter Mónika Fodor, Tamás Erdélyi, Zoltán Szilágyi, Imre Miklós