Phase-pure ε-Ga2O3 thin films on c-plane sapphire substrates at low temperature by plasma-enhanced ALD: Growth, characterization, and interface analysis
Titel:
Phase-pure ε-Ga2O3 thin films on c-plane sapphire substrates at low temperature by plasma-enhanced ALD: Growth, characterization, and interface analysis
Auteur:
Zhang, Jinteng Zeng, Xiaohong Wu, Ying Lin, Na Li, Qi Mu, Wenxiang Fu, Bo Ding, Sunan Jia, Zhitai