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Journal description
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Details for article 18 of 136 found articles
| Title: |
DC vacuum arc deposition system with coiled anode for ta-C films achieving a high deposition rate |
| Author: |
Watanabe, Seiya Kito, Jumpei Sano, Genki Oneda, Mirano Bando, Takahiro Takikawa, Hirofumi Sugita, Hiroaki Hattori, Takahiro Gima, Hiroki |
| Appeared in: |
Vacuum |
| Paging: | Volume 233 () nr. C pages p. |
| Year: |
2025 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 136 found articles
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