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  Analytical theory of low and medium energy ion reflection by target surface atoms during sputtering
 
 
Title: Analytical theory of low and medium energy ion reflection by target surface atoms during sputtering
Author: Pustovit, Alexander N.
Appeared in: Vacuum
Paging: Volume 229 () nr. C pages p.
Year: 2024
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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