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HiPIMS-grown AlN buffer for threading dislocation reduction in DC-magnetron sputtered GaN epifilm on sapphire substrate |
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Title: |
HiPIMS-grown AlN buffer for threading dislocation reduction in DC-magnetron sputtered GaN epifilm on sapphire substrate |
Author: |
Chang, Jui-Che Tseng, Eric Nestor Lo, Yi-Ling Nayak, Sanjay Lundin, Daniel Persson, Per O.Å. Horng, Ray-Hua Hultman, Lars Birch, Jens Hsiao, Ching-Lien |
Appeared in: |
Vacuum |
Paging: |
Volume 217 () nr. C pages p. |
Year: |
2023 |
Contents: |
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Publisher: |
The Authors |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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