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Research on the mechanism and influence of P incorporation in N-rich nitride AlPN and growth of high quality AlPN/GaN HEMT |
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Title: |
Research on the mechanism and influence of P incorporation in N-rich nitride AlPN and growth of high quality AlPN/GaN HEMT |
Author: |
Yao, Yixin Zhang, Yachao Zhang, Jincheng Li, Yifan Ma, Jinbang Chen, Kai Zhu, Jiaduo Xu, Shengrui Bai, Junchun Cheng, Bin Zhao, Shenglei Hao, Yue |
Appeared in: |
Vacuum |
Paging: |
Volume 216 () nr. C pages p. |
Year: |
2023 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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