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Tailoring the structural and optical properties of fabricated TiO2 thin films by O2 duty cycle in reactive gas-timing magnetron sputtering |
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Title: |
Tailoring the structural and optical properties of fabricated TiO2 thin films by O2 duty cycle in reactive gas-timing magnetron sputtering |
Author: |
Chittinan, Donyawan Buranasiri, Prathan Lertvanithphol, Tossaporn Eiamchai, Pitak Tantiwanichapan, Khwanchai Sathukarn, Asmar Limwichean, Saksorn Klamchuen, Annop Wutikhun, Tuksadon Limsuwan, Pichet Nakajima, Hideki Phae-ngam, Wuttichai Triamnak, Narit Horprathum, Mati |
Appeared in: |
Vacuum |
Paging: |
Volume 214 () nr. C pages p. |
Year: |
2023 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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