|
In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning |
|
|
|
Titel: |
In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning |
Auteur: |
Wang, Sishu Ye, Zongbiao Pu, Guo Liu, Jianxing Yang, Li Jing, Wenna Yu, Mingming Yang, Fangling Peng, Yichao Gou, Fujun Wei, Jianjun |
Verschenen in: |
Vacuum |
Paginering: |
Jaargang 212 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
|
Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|