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                                       Details for article 32 of 80 found articles
 
 
  Excellent diffusion barrier property of amorphous NbMoTaW medium entropy alloy thin films used in Cu/Si Connect System
 
 
Title: Excellent diffusion barrier property of amorphous NbMoTaW medium entropy alloy thin films used in Cu/Si Connect System
Author: Hu, K.
Hu, Q.F.
Xu, X.
Chen, S.H.
Ma, J.
Dong, W.W.
Appeared in: Vacuum
Paging: Volume 202 () nr. C pages p.
Year: 2022
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 32 of 80 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands