Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
Titel:
Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
Auteur:
Zheng, Yuting Jia, Yanwei Liu, Jinlong Wei, Junjun Chen, Liangxian An, Kang Yan, Xiongbo Zhang, Xiaotong Ye, Haitao Ouyang, Xiaoping Li, Chengming