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Journal description
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Details for article 28 of 56 found articles
| Title: |
Influences of aluminum doping on the microstructures and electrical properties of tantalum nitride thin films before and after annealing |
| Author: |
Wang, Kao-Yuan Chang, Ting-Chang Chen, Wen-Chung Zhang, Yong-Ci Tseng, Yi-Ting Yang, Chih-Cheng Lin, Chun-Chu Wu, Pei-Yu Tan, Yung-Fang Tsai, Tsung-Ming |
| Appeared in: |
Vacuum |
| Paging: | Volume 197 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 56 found articles
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