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Journal description
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Details for article 13 of 69 found articles
| Title: |
Development of an EPU vacuum system using lumped NEG-ion combination pumps |
| Author: |
Chan, C.K. Chang, C.C. Yang, I.C. Cheng, C.M. Chen, B.Y. Shueh, C. Cheng, Y.T. Guo, Y.H. |
| Appeared in: |
Vacuum |
| Paging: | Volume 195 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 69 found articles
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