Composition, dielectric breakdown, and bandgap of ultra-thin amorphous boron oxynitride produced by magnetron sputtering
Titel:
Composition, dielectric breakdown, and bandgap of ultra-thin amorphous boron oxynitride produced by magnetron sputtering
Auteur:
Arnold, Corey L. Iheomamere, Chukwudi E. Dockins, Maddox Gellerup, Spencer Glavin, Nicholas R. Muratore, Christopher Shepherd, Nigel D. Voevodin, Andrey A.