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Optimization of inductively coupled plasma etching for distributed Bragg reflectors in vertical cavity surface emitting lasers |
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Titel: |
Optimization of inductively coupled plasma etching for distributed Bragg reflectors in vertical cavity surface emitting lasers |
Auteur: |
Xun, Meng Pan, Guanzhong Zhang, Runze Zhao, Zhuangzhuang Sun, Yun Liu, Yang Li, Xueqin Wang, Dahai Zhou, Jingtao Wu, Dexin |
Verschenen in: |
Vacuum |
Paginering: |
Jaargang 188 () nr. C pagina's p. |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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