|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 23 of 72 found articles
| Title: |
High-rate synthesis of SiCN films using single-source silicon precursor with high-density helicon plasma |
| Author: |
Ma, Xiao Mao, Zhibiao Xu, Dongsheng Ding, Yuqiang Xu, Chongying |
| Appeared in: |
Vacuum |
| Paging: | Volume 177 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 72 found articles
| << previous | next >> |