Methane as a novel doping precursor for deposition of highly conductive ZnO thin films by magnetron sputtering
Titel:
Methane as a novel doping precursor for deposition of highly conductive ZnO thin films by magnetron sputtering
Auteur:
Vasin, A.V. Rusavsky, A.V. Bortchagovsky, E.G. Gomeniuk, Y.V. Nikolenko, A.S. Strelchuk, V.V. Yatskiv, R. Tiagulskyi, S. Prucnal, S. Skorupa, W. Nazarov, A.N.