|
Hydrogen-free fluorinated DLC films with high hardness prepared by using T-shape filtered arc deposition system |
|
|
|
Titel: |
Hydrogen-free fluorinated DLC films with high hardness prepared by using T-shape filtered arc deposition system |
Auteur: |
Imai, Takahiro Harigai, Toru Tanimoto, Tsuyoshi Isono, Ryo Iijima, Yushi Suda, Yoshiyuki Takikawa, Hirofumi Kamiya, Masao Taki, Makoto Hasegawa, Yushi Kaneko, Satoru Kunitsugu, Shinsuke Ito, Mikio |
Verschenen in: |
Vacuum |
Paginering: |
Jaargang 167 (2019) nr. C pagina's 536-541 |
Jaar: |
2019 |
Inhoud: |
|
Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|