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Journal description
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Details for article 8 of 74 found articles
| Title: |
Comparison of linear transformations for deriving kinetic constants during silicon etching in Cl2 environment |
| Author: |
Knizikevičius, R. |
| Appeared in: |
Vacuum |
| Paging: | Volume 157 (2018) nr. C pages 391-394 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 74 found articles
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