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Journal description
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Details for article 46 of 47 found articles
| Title: |
Water vapor transmission rate property of SiNx thin films prepared by low temperature (<100 °C) linear plasma enhanced chemical vapor deposition |
| Author: |
Yun, Seung-Jin Abidov, Amir Kim, Sungjin Choi, Jung-Su Cho, Byeong Seong Chung, Seog Chul |
| Appeared in: |
Vacuum |
| Paging: | Volume 148 (2018) nr. C pages 33-40 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 46 of 47 found articles
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