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  Adaptive robust control of dynamic gas pressure in a vacuum servo system
 
 
Title: Adaptive robust control of dynamic gas pressure in a vacuum servo system
Author: Cheng, Xiaoxia
Du, Linglong
Yang, Gang
Li, Baoren
Appeared in: Vacuum
Paging: Volume 148 (2018) nr. C pages 184-194
Year: 2018
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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