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Journal description
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Details for article 16 of 19 found articles
| Title: |
Stable reactive deposition of amorphous Al2O3 films with low residual stress and enhanced toughness using pulsed dc magnetron sputtering with very low duty cycle |
| Author: |
Kohout, Jiří Bousser, Etienne Schmitt, Thomas Vernhes, Richard Zabeida, Oleg Klemberg-Sapieha, Jolanta Martinu, Ludvik |
| Appeared in: |
Vacuum |
| Paging: | Volume 124 (2016) nr. C pages 5 p. |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 19 found articles
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