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Journal description
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Details for article 4 of 36 found articles
| Title: |
Application of Cu–C and Cu–V alloys in barrier-less copper metallization |
| Author: |
Fei, Cao Gao-hui, Wu Long-tao, Jiang Guo-qin, Chen |
| Appeared in: |
Vacuum |
| Paging: | Volume 122 (2015) nr. PA pages 5 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 36 found articles
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