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Journal description
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Details for article 24 of 87 found articles
| Title: |
Etch characteristics of MgO thin films in Cl2/Ar, CH3OH/Ar and CH4/Ar plasmas |
| Author: |
Lee, Il Hoon Lee, Tea Young Hwang, Su Min Chung, Chee Won |
| Appeared in: |
Vacuum |
| Paging: | Volume 101 (2014) nr. C pages 5 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 24 of 87 found articles
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