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Journal description
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Details for article 3 of 31 found articles
| Title: |
A multiscale systems approach to microelectronic processes |
| Author: |
Braatz, Richard D. Alkire, Richard C. Seebauer, Edmund G. Drews, Timothy O. Rusli, Effendi Karulkar, Mohan Xue, Feng Qin, Yan Jung, Michael Y.L. Gunawan, Rudiyanto |
| Appeared in: |
Computers and chemical engineering |
| Paging: | Volume 30 (2006) nr. 10-12 pages 14 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 31 found articles
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