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Journal description
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Details for article 6 of 7 found articles
| Title: |
Modeling and control of microelectronics materials processing |
| Author: |
Badgwell, T.A. Breedijk, T. Bushman, S.G. Butler, S.W. Chatterjee, S. Edgar, T.F. Toprac, A.J. Trachtenberg, I. |
| Appeared in: |
Computers and chemical engineering |
| Paging: | Volume 19 (1995) nr. 1 pages 41 p. |
| Year: |
1995 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 7 found articles
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