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Journal description
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Details for article 6 of 15 found articles
| Title: |
Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control |
| Author: |
Koo, Junmo Ha, Daegeun Park, Damdae Roh, Hyun-Joon Ryu, Sangwon Kim, Gon-Ho Baek, Kye Hyun Han, Chonghun |
| Appeared in: |
Computers and chemical engineering |
| Paging: | Volume 100 (2017) nr. C pages 38-47 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 15 found articles
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