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                                       Details for article 4 of 15 found articles
 
 
  Automated inspection of IC wafer contamination
 
 
Title: Automated inspection of IC wafer contamination
Author: Aghaeizadeh Zoroofi, Reza
Taketani, Hisashi
Tamura, Shinichi
Sato, Yoshinobu
Sekiya, Kazuma
Appeared in: Pattern recognition
Paging: Volume 34 (2001) nr. 6 pages 11 p.
Year: 2001
Contents:
Publisher: Pattern Recognition Society
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4 of 15 found articles
 
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