Suppression of boron diffusion using carbon co-implantation in DRAM
Titel:
Suppression of boron diffusion using carbon co-implantation in DRAM
Auteur:
Lee, Suk Hun Park, Se Geun Kim, Shin Deuk Jung, Hyuck-Chai Kim, Il Gweon Kang, Dong-Ho Kim, Dae Jung Lee, Kyu Pil Choi, Joo Sun Baek, Jung-Woo Choi, Moonsuk Park, Yongkook Choi, Changhwan Park, Jin-Hong