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                                       Details for article 86 of 117 found articles
 
 
  RF sputtering of multilayer thin films
 
 
Title: RF sputtering of multilayer thin films
Author:
Appeared in: Microelectronics reliability
Paging: Volume 9 (1970) nr. 3 pages 1 p.
Year: 1970
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 86 of 117 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands