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Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics |
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Title: |
Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics |
Author: |
Mizubayashi, Wataru Yasuda, Naoki Okada, Kenji Ota, Hiroyuki Hisamatsu, Hirokazu Iwamoto, Kunihiko Tominaga, Koji Yamamoto, Katsuhiko Horikawa, Tsuyoshi Nabatame, Toshihide Satake, Hideki Toriumi, Akira |
Appeared in: |
Microelectronics reliability |
Paging: |
Volume 45 (2005) nr. 7-8 pages 10 p. |
Year: |
2005 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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