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Journal description
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Details for article 15 of 40 found articles
| Title: |
Effect of contact-etch-stop-layer and Si1-xGex channel mechanical properties on nano-scaled short channel NMOSFETs with dummy gate arrays |
| Author: |
Lee, Chang-Chun Liu, Chuan-Hsi Li, Dian-Yong Hsieh, Chia-Ping |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 83 (2018) nr. C pages 230-234 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 40 found articles
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