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Improved reliability characteristics of Ge MOS devices by capping Hf or Zr on interfacial layer |
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Titel: |
Improved reliability characteristics of Ge MOS devices by capping Hf or Zr on interfacial layer |
Auteur: |
Li, Yan-Lin Chang-Liao, Kuei-Shu Chang, Yu-Wei Huang, Tse-Jung Li, Chen-Chien Gu, Zhao-Chen Chen, Po-Yen Wu, Tzung-Yu Huang, Jiayi Chu, Fu-Chuan Yi, Shih-Han |
Verschenen in: |
Microelectronics reliability |
Paginering: |
Jaargang 79 (2017) nr. C pagina's 4 p. |
Jaar: |
2017 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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