Impact of via density and passivation thickness on the mechanical integrity of advanced Back-End-Of-Line interconnects
Titel:
Impact of via density and passivation thickness on the mechanical integrity of advanced Back-End-Of-Line interconnects
Auteur:
Ključar, Luka González, Mario Croes, Kristof De Wolf, Ingrid De Messemaeker, Joke Murdoch, Gayle Nolmans, Philip De Vos, Joeri Bömmels, Jürgen Beyne, Eric Tőkei, Zsolt